Electric lamp and discharge devices – Fluent material supply or flow directing means – Plasma
Reexamination Certificate
2011-01-18
2011-01-18
Patel, Nimeshkumar D (Department: 2879)
Electric lamp and discharge devices
Fluent material supply or flow directing means
Plasma
C313S141000, C315S111210
Reexamination Certificate
active
07872406
ABSTRACT:
An apparatus and a process for generating, accelerating and propagating beams of electrons and plasma at high density, the apparatus comprising: a first dielectric tube, which contains gas; a hollow cathode, which is connected to said first dielectric tube; a second dielectric tube, which is connected to said hollow cathode and protrudes inside, and is connected to, a deposition chamber; an anode, which is arranged around said second dielectric tube, in an intermediate position; means for applying voltage to said cathode and said anode; means for evacuating the gas from the chamber; and means for spontaneous conversion of gas in the first dielectric tube into plasma.
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Bowman Mary Ellen
Carlo Taliani
Francesco Cina Matacotta
Marshall & Gerstein & Borun LLP
Patel Nimeshkumar D
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