Apparatus and process for forming electrodes of electronic compo

Coating processes – Coating by vapor – gas – or smoke – Metal coating

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427124, 427282, 427576, 2041921, 20419217, B05D 512, C23C 1600, C23C 1400

Patent

active

058538054

ABSTRACT:
An apparatus and process for forming at least one electrode of an electronic component includes the steps of preparing a work; placing a mask on a principal plane of the work; and applying an electrode material over the mask onto the principal plane of the work to form at least one electrode. The mask preferably comprises, for instance, a first masking portion having a substantially rectangular loop shape and a second masking portion having a substantially rectangular shape, and four pseudo masking portions shaped into substantially rectangular strips and which support the first masking portion. In this case, four through holes are formed in the masking member by the synergistic function of the first masking portion, the second masking portion, and the pseudo masking portions.

REFERENCES:
patent: 4084506 (1978-04-01), Nakatani
patent: 4252839 (1981-02-01), Wakasugi
Kutch et al., "Mechless Moly-Mask", IBM Technical Disclosure Bulletin, vol. 12, No. 12, pp. 2073-2074, May 1990.

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