Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-10-24
2006-10-24
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
07126668
ABSTRACT:
A process for the determination of focal plane deviation uniquely due to the scanning dynamics associated with a photolithographic scanner is described. A series of lithographic exposures is performed on a resist coated silicon wafer using a photolithographic scanner. The lithographic exposures produce an array of focusing fiducials that are displaced relative to each other in a unique way. The resulting measurements are fed into a computer algorithm that calculates the dynamic scanning field curvature in an absolute sense in the presence of wafer height variation and other wafer/reticle stage irregularities. The dynamic scan field curvature can be used to improve lithographic modeling, overlay modeling, and advanced process control techniques related to scanner stage dynamics.
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Hunter, Jr. Robert O.
Smith Adlai H.
Litel Instruments
Nelson Vivian
Perkey W. B.
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