Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1989-06-08
1990-05-29
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, 427 37, 118726, C23C 1434, B05D 306
Patent
active
049293222
ABSTRACT:
A process and apparatus for coating a substrate with source material from a solid cathode in a vacuum chamber supplied with a reactive or inert gas at low pressure. An electric arc is generated between an evaporable end surface of the cathode and an anode. An elongated member surrounds the cathode and extends a predetermined minimum distance "X" beyond the evaporable end surface of the cathode to form a cathode chamber. The inert or reactive gas is directed to flow into the cathode chamber before entering the vacuum chamber.
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Sue Jiinjen A.
Troue Harden H.
Lieberstein E.
Nguyen Nam X.
Union Carbide Corporation
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