Coating apparatus – Gas or vapor deposition – With treating means
Patent
1996-12-13
1999-04-20
Dang, Thi
Coating apparatus
Gas or vapor deposition
With treating means
118723ER, 20429805, H05H 100
Patent
active
058955313
ABSTRACT:
An apparatus for initial ion cleaning, vapor metal deposition and protective coating of objects by vacuum deposition. The apparatus includes a vacuum chamber for receiving the objects which are held on a movable rack or support. A metal such as aluminum is vaporized centrally in the chamber in a well known fashion after the chamber has been substantially evacuated of air molecules for uniform vapor deposition of the metal atop exposed surfaces of the objects. A polymerization gun includes an elongated housing which is connected to an external surface of the chamber over an elongated opening formed through a chamber side wall. The polymerization gun also includes an elongated conductive preferably aluminum rod disposed along the opening and two apertured delivery tubes or members positioned within the housing. The conductive rod is electrically isolated from the housing and chamber and connected to a d.c. or a.c. high voltage power source as a cathode to produce plasma during ion cleaning and when applying the protective monomer coating. By positioning the two delivery tubes in close proximity to the conductive rod, both inert gas used for ion cleaning and a liquid monomer which is vaporized as it is drawn into the housing by chamber vacuum must each in proper sequence pass through the plasma before entering the chamber to enhance uniformity of cleaning, deposition and polymerization of the protective coating of the objects.
REFERENCES:
patent: 4842893 (1989-06-01), Yializis et al.
patent: 5656141 (1997-08-01), Betz et al.
Compu-Vac Systems, Inc.
Dang Thi
Prescott Charles J.
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