Apparatus and methods relating to scanning ion beams

Details Apparatus and methods relating to scanning ion beams Apparatus and methods relating to scanning ion beams

1991-03-05

1992-03-24

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 2504922, 2504923, H01J 37147

Patent

active

050991302

ABSTRACT:
A converter 26 for converting an angularly scanned ion beam 11 into a parallel scanned ion beam comprises first and second electrodes 27 and 28 positioned adjacent each other and shaped to follow concentric part-conical surfaces. The inner part-conical electrode 27 is at beam line potential and has an entry aperture 31 for receiving the ion beam, and an exit aperture 32 through which the beam exits after being bent through 90.degree. by a potential difference across the electrodes 27 and 28. The entry beam 11 is angularly scanned by an electrostatic scanner positioned where the beam 11 passes the cone axis 33, the beam being scanned through paths lying along radii of the cone axis. The exit beam 11 emerges in a direction which is substantially parallel to the cone axis throughout the angular scanning of the entry beam.

REFERENCES:
patent: 3569757 (1971-03-01), Brewer et al.
patent: 4492873 (1983-01-01), Dmitriev et al.
patent: 4578589 (1986-03-01), Aitken

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