Apparatus and methods for viewing identification marks on semico

Details Apparatus and methods for viewing identification marks on semico Apparatus and methods for viewing identification marks on semico

1994-01-11

1998-11-03

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

356401, 359390, G01B 1100

Patent

active

058317384

ABSTRACT:
Apparatus and method for reading an identification mark on a semi-conductor wafer. The wafer includes a marking area which bears a relief mark. The marking area is illuminated by a segmented light source and is viewed by a viewing device. The viewing device sees a dark segment and an adjacent lighted segment which preferably surrounds the dark segment, and the mark appears as a light image in the dark segment. Preferably the segmented light source is a diffuse light source with an opaque patch at its center. The method is particularly effective for reading soft marks with low profiles.

REFERENCES:
patent: 4232937 (1980-11-01), Swaminathan et al.
patent: 4241251 (1980-12-01), Yonekubo
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 4561731 (1985-12-01), Kley
patent: 4606616 (1986-08-01), Parker
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4706168 (1987-11-01), Weisner
patent: 4734578 (1988-03-01), Horikawa
patent: 4758730 (1988-07-01), Bazin et al.
patent: 4972093 (1990-11-01), Cochran et al.
patent: 5099354 (1992-03-01), Lichtman et al.
patent: 5231536 (1993-07-01), Wilt et al.
patent: 5232536 (1993-08-01), Wilt et al.
patent: 5265170 (1993-11-01), Hine et al.
Patent Abstracts of Japan, 12, 224, 721 (Abstract of Japanese Patent Application No. 63/018209).
Trade Brochure entitled "XRL ScribeView 2", published by SRL Inc.
Catalog entitled "Precision Optics", published in 1990 by Spindler and Hoyer Inc., pp. G1 and G2.

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