Apparatus and methods for treating electroless plating baths

Details Apparatus and methods for treating electroless plating baths Apparatus and methods for treating electroless plating baths

1992-11-20

1994-01-11

Dawson, Robert A.

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

210638, 210639, 210651, 210652, 210912, B01D 1100, B01D 6100

Patent

active

052778177

ABSTRACT:
Apparatus and methods for removing polyvalent by-product anions, e.g. borate and orthophosphate ions, from electroless metal plating baths employing borane or hypophosphite reducing agents and typically comprising monovalent anions or neutral zwitterions as metal chelant and/or counterion. The apparatus and methods of this invention employ (a) solvent extraction to remove metal species for recycle, (b) anion filtration to separate polyvalent anions from neutral zwitterions and monovalent anions and (c) ion exchange units to remove metal and metal chelant species from polyvalent anion-containing waste streams.

REFERENCES:
patent: 4755298 (1988-07-01), Grinstead
patent: 4895661 (1990-01-01), Cadotte
patent: 4956154 (1990-09-01), Magdics et al.
patent: 5041227 (1991-08-01), Van Eikeren et al.
patent: 5112392 (1992-05-01), Anderson et al.
patent: 5192418 (1993-03-01), Hughes et al.

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