Apparatus and methods for through substrate via test

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07977962

ABSTRACT:
A stack of vertically-connected, horizontally-oriented integrated circuits (ICs) may have electrical connections from the front side of one IC to the back side of another IC. Electrical signals may be transferred from the back side of one IC to the front side of the same IC by means of through substrate vias (TSVs), which may include through silicon vias. Electronic apparatus, systems, and methods may operate to test and/or replace defective TSVs. Additional apparatus, systems and methods are disclosed.

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patent: 6784685 (2004-08-01), Chao et al.
patent: 6787802 (2004-09-01), Yokogawa
patent: 6898062 (2005-05-01), Russ et al.
patent: 7791070 (2010-09-01), Huang et al.
patent: 2006/0044001 (2006-03-01), Cano et al.
patent: 2007/0145999 (2007-06-01), Cano et al.
patent: 2008/0144243 (2008-06-01), Mariani et al.
patent: 2009/0051039 (2009-02-01), Kuo et al.

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