Apparatus and methods for surface contour measurement

Details Apparatus and methods for surface contour measurement Apparatus and methods for surface contour measurement

2007-07-10

2007-07-10

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Triangulation

C356S601000, C356S614000, C250S23700G

Reexamination Certificate

active

11128114

ABSTRACT:
Apparatus and methods of measuring three-dimensional position information of a onto a surface of an object including two sources of radiation separated by a distance, each source having a spectral distribution, and being coherent with respect to the other of the sources, a control system moving each of the sources relative to the other of the sources, and a detector positioned to receive radiation scattered from the point on the surface of the object. In another embodiment, the two sources of radiation include, an initial source of a beam of radiation having a spectral width, a beam separator in optical communication with the initial source of a beam of radiation generating a first optical beam and a second optical beam, and an imaging system optically connected to the beam separator.

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