Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2007-10-16
2007-10-16
Bella, Matthew C. (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S144000, C382S145000
Reexamination Certificate
active
10175229
ABSTRACT:
Disclosed are methods and apparatus for automatically organizing and/or analyzing a plurality of defect images without first providing a predefined set of classified images (herein referred to as a training set). In other words, sorting is not based on a training set or predefined classification codes for such defect images. In one embodiment, the defect images each include associated identifying data, such as a fabrication identifier, lot number, wafer number, and layer identifier. Initially, the defect images are sorted according to at least a portion of the associated identifying data into a plurality of “identifying data groups” or image families. The defect data in each identifying data group is then automatically sorted according to defect appearance. That is, similar defect images are associated with a single bin and similar bins are associated with other similar bins. For example, similar bins are arranged next to each other within a graphical user interface (GUI). A representative feature vector (herein referred to as a “centroid”) is then associated with each bin. The centroid generally represents the images within the particular bin. A search for images that “look like” a specified target image may then be efficiently performed on a particular identifying data group using the centroids of each bin. The target image's feature vector is compared with the centroid of each bin that is within the same identifying data group or image family as the target image. The techniques of the present invention may also be applied to wafer maps, as well as defect images.
REFERENCES:
patent: 4441205 (1984-04-01), Berkin et al.
patent: 5093867 (1992-03-01), Hori et al.
patent: 5121439 (1992-06-01), Fukuda et al.
patent: 5353356 (1994-10-01), Waugh et al.
patent: 5529437 (1996-06-01), Filipowski
patent: 5537670 (1996-07-01), Cox et al.
patent: 5544256 (1996-08-01), Brecher et al.
patent: 5598341 (1997-01-01), Ling et al.
patent: 5638465 (1997-06-01), Sano et al.
patent: 5761064 (1998-06-01), La et al.
patent: 5841893 (1998-11-01), Ishikawa et al.
patent: 5862055 (1999-01-01), Chen et al.
patent: 5893095 (1999-04-01), Jain et al.
patent: 5911139 (1999-06-01), Jain et al.
patent: 5913205 (1999-06-01), Jain et al.
patent: 5999003 (1999-12-01), Steffan et al.
patent: 6092059 (2000-07-01), Straforini et al.
patent: 6097887 (2000-08-01), Hardikar et al.
patent: 6104835 (2000-08-01), Han
patent: 6148099 (2000-11-01), Lee et al.
patent: 6177287 (2001-01-01), Steffan et al.
patent: 6185322 (2001-02-01), Ishikawa et al.
patent: 6233719 (2001-05-01), Hardikar et al.
patent: 6292582 (2001-09-01), Lin et al.
patent: 6480627 (2002-11-01), Mathias et al.
patent: 6542830 (2003-04-01), Mizuno et al.
patent: 6687397 (2004-02-01), DeYong et al.
patent: 6751343 (2004-06-01), Ferrell et al.
patent: 6922482 (2005-07-01), Ben-Porath
patent: 6987873 (2006-01-01), Ben-Porath et al.
patent: 01/40145 (2001-07-01), None
Fan, Y.-H.; Moalem, Y., “Effective defect detection and classification methodology based on integrated laser scanning inspection and automatic defect classification”, Proc. IEEE Conference on Advanced Semiconductor Manufacturing, 1998, pp. 266-271□□.
Bakker et al, U.S. Appl. No. 09/724,633, entitled “Power Assisted Automatic Supervised Classifier Creation Tool for Semiconductor”, filed Nov. 28, 2000. *Copies of allowed claims attached.
U.S. Office Action dated Mar. 24, 2004, from related U.S. Appl. No. 09/724,633.
U.S. Office Action dated May 3, 2005, from related U.S. Appl. No. 09/724,633.
Aji Prashant A.
Bakker David R.
Belliveau James L.
Neroth Chacko C.
Bella Matthew C.
Beyer & Weaver, LLP
KLA-Tencor Technologies Corporation
Shah Utpal
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