Apparatus and methods for scanning conoscopic holography...

Details Apparatus and methods for scanning conoscopic holography... Apparatus and methods for scanning conoscopic holography...

2008-01-22

2008-01-22

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237600, C356S445000, C356S614000

Reexamination Certificate

active

10903332

ABSTRACT:
Apparatus and methods for scanning conoscopic holography measurements are disclosed. In one embodiment, a system includes a conoscopic holography sensor, a beam directing assembly, and a control assembly. The beam directing assembly is adapted to adjustably direct a laser beam from the sensor toward the workpiece, and to direct a reflected light from the workpiece into the sensor. The control assembly controllably adjusts a direction of the laser beam into a desired position on the workpiece. In one particular embodiment, the beam directing assembly includes first and second mirrors coupled to first and second galvanometers for controllably directing the laser beam along first and second axes, respectively. Alternately, the system includes a calibration assembly having a three axis stage for performing calibrations of the laser beam location.

REFERENCES:
patent: 4707128 (1987-11-01), Coles
patent: 5111513 (1992-05-01), Turner et al.
patent: 5291314 (1994-03-01), Agranat et al.
patent: 5453969 (1995-09-01), Psaltis et al.
patent: 5615013 (1997-03-01), Rueb et al.
patent: 5909270 (1999-06-01), Moser et al.
patent: 5926295 (1999-07-01), Charlot et al.
patent: 5953137 (1999-09-01), Sirat et al.
patent: 6424437 (2002-07-01), Popovich
patent: 6473209 (2002-10-01), Popovich
patent: 6678078 (2004-01-01), Popovich et al.
patent: 6720567 (2004-04-01), Fordahl et al.
patent: 2006/0074509 (2006-04-01), Di Fabrizio et al.

Affiliated with

Also associated with

Rating

Apparatus and methods for scanning conoscopic holography... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and methods for scanning conoscopic holography..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and methods for scanning conoscopic holography... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3935897