Apparatus and methods for scanning conoscopic holography...

Details Apparatus and methods for scanning conoscopic holography... Apparatus and methods for scanning conoscopic holography...

2008-01-22

2008-01-22

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237600, C356S445000, C356S614000

Reexamination Certificate

active

07321421

ABSTRACT:
Apparatus and methods for scanning conoscopic holography measurements are disclosed. In one embodiment, a system includes a conoscopic holography sensor, a beam directing assembly, and a control assembly. The beam directing assembly is adapted to adjustably direct a laser beam from the sensor toward the workpiece, and to direct a reflected light from the workpiece into the sensor. The control assembly controllably adjusts a direction of the laser beam into a desired position on the workpiece. In one particular embodiment, the beam directing assembly includes first and second mirrors coupled to first and second galvanometers for controllably directing the laser beam along first and second axes, respectively. Alternately, the system includes a calibration assembly having a three axis stage for performing calibrations of the laser beam location.

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