Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-07-29
2008-07-29
Lee (Andrew), Hwa S (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
11463036
ABSTRACT:
A wavefront interferometry system including: a wavefront interferometer that during operation combines a reference beam from a reference object and a measurement beam from a measurement object to generate a combined beam; and a processor system programmed to processes the combined beam to concurrently generate therefrom a control signal and information about the difference in wavefront profiles of the reference and measurement objects, wherein the control signal controls a system parameter so as to maintain an optical path length difference between a spot on the reference object and a corresponding spot on the measurement object at a constant value mod 2π.
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Lee (Andrew) Hwa S
Wilmer Cutler Pickering Hale and Dorr LLP
Zetetic Institute
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