Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2005-05-17
2005-05-17
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C134S034000, C134S137000, C134S148000, C134S151000, C134S153000, C134S184000, C134S198000, C134S902000, C310S311000, C310S320000, C310S367000, C310S368000, C310S369000, C310S370000, C438S906000
Reexamination Certificate
active
06892738
ABSTRACT:
The present invention provides a megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate. The apparatus includes a probe having one of a variety of cross-sections configured to decrease the ratio of normal-incident waves to shallow-angle waves. One such cross-section includes a channel running along a portion of the lower edge of the probe. Another cross-section includes a narrow lower edge of the probe. Another cross-section is elliptical. Another cross-section includes transverse bores originating in the lower edge of the probe. As an alternative to, or in addition to, providing a probe having a cross-section other than circular, the present invention may also provide a probe having a roughened lower surface.
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Bran Mario E.
Olesen Michael B.
Wu Yi
Belles Brian L.
Cozen O'Connor P.C.
Fein Michael B.
Goldfinger Technologies, LLC
Kornakov M.
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