Data processing: artificial intelligence – Neural network – Learning task
Reexamination Certificate
2011-01-18
2011-01-18
Holmes, Michael (Department: 2129)
Data processing: artificial intelligence
Neural network
Learning task
Reexamination Certificate
active
07873585
ABSTRACT:
Apparatus and methods are provided for predicting a plurality of unknown parameter values (e.g. overlay error or critical dimension) using a plurality of known parameter values. In one embodiment, the method involves training a neural network to predict the plurality of parameter values. In other embodiments, the prediction process does not depend on an optical property of a photolithography tool. Such predictions may be used to determine wafer lot disposition.
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Holmes Michael
KLA-Tencor Technologies Corporation
Weaver Austin Villeneuve & Sampson LLP
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