Data processing: generic control systems or specific application – Generic control system – apparatus or process – Supervisory control
Reexamination Certificate
2008-12-18
2011-12-20
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Supervisory control
Reexamination Certificate
active
08082044
ABSTRACT:
Disclosed are apparatus and methods for embodiments for efficiently and flexibly controlling hardware devices in a semiconductor processing system are provided for use in a distributed control arrangement. In general, the distributed arrangement includes at least one upper-level controller that is configurable with a computer program sequence of instructions for controlling one or more hardware devices of a processing tool. The hardware devices are controlled through one or more lower-level controllers. Prior to execution of the program sequence of the upper-level controller, at least one instruction of this program is pre-compiled so as to translate the instruction for execution by a selected lower-level controller and to add an at least one interlock check to such pre-compiled instruction and make the translated instruction accessible to at least one lower-level controller. The interlock check specifies one or more condition(s) for the selected lower-level controller to execute the pre-compiled instruction. Any number of instructions of the upper-level controller may be translated for use by any number of selected lower-level controllers, where some of the translated instructions include one or more interlock checks.
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Notice of Allowance mailed Sep. 19, 2008 from U.S. Appl. No. 11/556,989.
Jain Jaideep
Kleinke Steve
Zhou Qiang
De'cady Albert
Novellus Systems Inc.
Rapp Chad
Weaver Austin Villeneuve & Sampson LLP
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