Apparatus and methods for nanolithography using nanoscale...

Details Apparatus and methods for nanolithography using nanoscale... Apparatus and methods for nanolithography using nanoscale...

2006-08-24

2009-12-15

Connelly Cushwa, Michelle R (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S015000, C385S116000, C385S120000

Reexamination Certificate

active

07634162

ABSTRACT:
An apparatus and methods for nanolithography using nanoscale optics are disclosed herein. Submicron-scale structures may be obtained using standard photolithography systems with a de-magnifying lens. A de-magnifying lens for use in a standard photolithography system includes a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes.

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