Apparatus and methods for measuring thickness and refractive...

Optics: measuring and testing – Dimension – Thickness

Reexamination Certificate

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C356S445000

Reexamination Certificate

active

06970256

ABSTRACT:
Apparatus and methods for determining thickness and refractive index of thin films and bulk materials are provided. Such apparatus may include a sample support adapted to hold a sample in close contact with the base of a prism, a thermal controller that regulates the temperature of the sample, a light source operable to direct incident light at a variety of incident angles the base of the prism, and a detector positioned to receive output light from the prism. The output light has intensity variations as a function of incident angle. Sample thickness and refractive index may be determined from the intensity variations.

REFERENCES:
patent: 5237392 (1993-08-01), Hickel et al.
patent: 5351127 (1994-09-01), King et al.
patent: 5565978 (1996-10-01), Okubo et al.
patent: 6549276 (2003-04-01), Longtin
patent: 2004/0235177 (2004-11-01), Guedon et al.
Metricon® Corporation, “Model 2010 Prism Coupler-Major Application Areas”, Jan. 1997, www.metricon.com, 2 pages.
“Characterize with a Wave-Guide Coupler”, Back to Basics Analytical Instrumentation,R&D Magazine, Dec. 2000, 55, www.rdmag.com.

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