Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2005-11-29
2005-11-29
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C356S445000
Reexamination Certificate
active
06970256
ABSTRACT:
Apparatus and methods for determining thickness and refractive index of thin films and bulk materials are provided. Such apparatus may include a sample support adapted to hold a sample in close contact with the base of a prism, a thermal controller that regulates the temperature of the sample, a light source operable to direct incident light at a variety of incident angles the base of the prism, and a detector positioned to receive output light from the prism. The output light has intensity variations as a function of incident angle. Sample thickness and refractive index may be determined from the intensity variations.
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Stafira Michael P.
Woodcock & Washburn LLP
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