Apparatus and methods for measuring the optical thickness and in

Details Apparatus and methods for measuring the optical thickness and in Apparatus and methods for measuring the optical thickness and in

1981-12-02

1984-06-12

Rosenberger, R. A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356382, G02B 1106

Patent

active

044538286

ABSTRACT:
A method for measuring accurately the optical thickness and index of refraction of thin, optical membranes includes directing light onto the membrane at one or more known angles of incidence, finding at least one angle of incidence, called a null angle, where the membrane reflects substantially none of the incident light, then calculating the optical thickness of the membrane, its index of refraction, or both, from one or more such null angles. Apparatus for this purpose includes means for directing a light beam onto thin, optical membranes, means for varying the angle of incidence of a light beam upon the membrane, and means for detecting the angles of incidence of the light beam on the membrane, including the null angles.

REFERENCES:
patent: 3612692 (1971-10-01), Kruppa et al.
Bukreer et al., "A Laser Interference Thickness Gage", Measurement Techniques, vol. 18, No. 6, pp. 821-823, Jun. 1975.
Born et al., Principles of Optics, Pergamon Press, 1959, p. 16.

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