Apparatus and methods for manufacturing thin-film solar cells

Details Apparatus and methods for manufacturing thin-film solar cells Apparatus and methods for manufacturing thin-film solar cells

2011-06-28

2011-06-28

Roman, Angel (Department: 2812)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C438S014000, C438S095000, C257SE21528

Reexamination Certificate

active

07968353

ABSTRACT:
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web.

REFERENCES:
patent: 6372538 (2002-04-01), Wendt et al.
patent: 2008/0093221 (2008-04-01), Basol
patent: WO2005086238 (2005-09-01), None

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