Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-04-05
2005-04-05
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06876452
ABSTRACT:
Apparatus and methodology by which the position, angular orientation, and departure of a moving body, such as a scanning head, can be measured with high accuracy with respect to a nominally straight line as the body translates along that line. Monolithic metrology and scanning heads with integrally formed metrology surfaces are provided and fabricated of preferably identical materials having low thermal coefficients and high temporal stability. Measuring systems operate in conjunction with the integral metrology surfaces to provide interferometric information by which the position and angular attitude of the moving body is constantly monitored. Calibration arrangements are provided for determining the absolute position and attitude of the moving body with respect to the metrology frame as the two move relative to one another so that any errors can be compensated with appropriate correction functions.
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Evans Christopher James
Zanoni Carl A.
Caufield Francis J.
Connolly Patrick
Toatley , Jr. Gregory J.
Zygo Corporation
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