Apparatus and methods for heat loss pressure measurement

Details Apparatus and methods for heat loss pressure measurement Apparatus and methods for heat loss pressure measurement

1997-07-21

2000-02-15

Oen, William

Measuring and testing

Fluid pressure gauge

Electrical

73753, 73756, G01L 900, G01L 2112, G01L 700

Patent

active

060239794

ABSTRACT:
An improved Pirani gauge has a small-diameter wire sensing element, coplanar with a small-diameter wire compensating element, with two parallel flat thermally conductive plates spaced from the sensing and compensating elements. The sensing and compensating elements and their connections have the same physical dimensions, thermal properties and resistance properties. The connections have large thermal conductances to a uniform temperature region and the elements are located in the same vacuum environment. A DC heating current is used and confined to only the sensing element. A relatively small AC signal is used to sense bridge balance. A simplified three-dimensional pressure compensation formula provides accurate compensation while simplifying the collection of calibration data. The improved gauge provides significant advancements in Pirani gauge accuracy, production cost, and package size.

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