Apparatus and methods for ferroelectric ram fatigue testing

Details Apparatus and methods for ferroelectric ram fatigue testing Apparatus and methods for ferroelectric ram fatigue testing

2007-08-28

2007-08-28

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C702S108000, C438S003000, C257S295000

Reexamination Certificate

active

11152318

ABSTRACT:
Apparatus are provided for fatigue testing ferroelectric material in a wafer, including an on-chip oscillator to provide a bipolar waveform to a ferroelectric capacitor formed in the wafer, as well as a switching system to selectively provide external access to the ferroelectric capacitor. Test methods are also disclosed provided, including measuring a performance characteristic of a ferroelectric capacitor in the wafer, providing a bipolar waveform to the ferroelectric capacitor for a number of cycles using an on-chip oscillator, and again measuring the performance characteristic after an integer number of cycles of the bipolar waveform.

REFERENCES:
patent: 5254482 (1993-10-01), Fisch
patent: 5991189 (1999-11-01), Miwa
patent: 6323512 (2001-11-01), Noh et al.
patent: 6358758 (2002-03-01), Arita et al.
“Novel Self-Stressing Test Structures for Realistic High-Frequency Reliability Characterization”, Eric S. Snyder, David V. Campbell, Scot E. Swanson and Donald G. Pierce, IEEE/RPS, 1983, pp. 57-65.

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