Apparatus and methods for enabling robust separation between...

Details Apparatus and methods for enabling robust separation between... Apparatus and methods for enabling robust separation between...

2006-05-02

2006-05-02

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S600000, C356S394000

Reexamination Certificate

active

07038773

ABSTRACT:
Disclosed are methods and apparatus for analyzing the Raze data provided by an optical inspection tool. The Haze data is analyzed so as to detect defects associated with the specimen surface. In general, the Haze data is first conditioned so that background noise which corresponds to low frequency variation on the specimen is separated or removed from the Haze data prior to analysis of such Haze data. In a specific embodiment, low frequency variations in the specimen surface are characterized, in effect, as an optical surface upon which an incident beam is directed. The Haze data that conforms to this resulting polynomial equation is then subtracted from the original Haze data to result in residual data, where slow variations in surface roughness are subtracted out, leaving possible defect information in the residual Haze data. This residual Haze data may then be analyzed to determine whether the specimen contains a defect.

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