Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2005-03-29
2008-10-21
Wilkins, III, Harry D (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S230700, C204S252000
Reexamination Certificate
active
07438788
ABSTRACT:
An apparatus and method for electrochemical processing of microelectronic workpieces in a reaction vessel. In one embodiment, the reaction vessel includes: an outer container having an outer wall; a distributor coupled to the outer container, the distributor having a first outlet configured to introduce a primary flow into the outer container and at least one second outlet configured to introduce a secondary flow into the outer container separate from the primary flow; a primary flow guide in the outer container coupled to the distributor to receive the primary flow from the first outlet and direct it to a workpiece processing site; a dielectric field shaping unit in the outer container coupled to the distributor to receive the secondary flow from the second outlet, the field shaping unit being configured to contain the secondary flow separate from the primary flow through at least a portion of the outer container, and the field shaping unit having at least one electrode compartment through which the secondary flow can pass while the secondary flow is separate from the primary flow; an electrode in the electrode compartment; and an interface member carried by the field shaping unit downstream from the electrode, the interface member being in fluid communication with the secondary flow in the electrode compartment, and the interface member being configured to prevent selected matter of the secondary flow from passing to the primary flow.
REFERENCES:
patent: 1526644 (1925-02-01), Pinney
patent: 1881713 (1932-10-01), Laukel
patent: 2256274 (1941-09-01), Boedecker et al.
patent: 2707166 (1955-04-01), Brown et al.
patent: 3124520 (1964-03-01), Juda
patent: 3309263 (1967-03-01), Grobe
patent: 3328273 (1967-06-01), Creutz et al.
patent: 3537961 (1970-11-01), White et al.
patent: 3616284 (1971-10-01), Bodmer et al.
patent: 3664933 (1972-05-01), Clauss
patent: 3706635 (1972-12-01), Kowalski
patent: 3706651 (1972-12-01), Leland
patent: 3716462 (1973-02-01), Jensen
patent: 3727620 (1973-04-01), Orr
patent: 3798003 (1974-03-01), Ensley et al.
patent: 3798033 (1974-03-01), Yost, Jr.
patent: 3878066 (1975-04-01), Dettke et al.
patent: 3930963 (1976-01-01), Polichette et al.
patent: 3953265 (1976-04-01), Hood
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4000046 (1976-12-01), Weaver
patent: 4022679 (1977-05-01), Koziol et al.
patent: 4030015 (1977-06-01), Herko et al.
patent: 4046105 (1977-09-01), Gomez
patent: 4072557 (1978-02-01), Schiel
patent: 4073708 (1978-02-01), Hicks
patent: 4082638 (1978-04-01), Jumer
patent: 4105532 (1978-08-01), Haines et al.
patent: 4113577 (1978-09-01), Ross et al.
patent: 4132567 (1979-01-01), Blackwood
patent: 4134802 (1979-01-01), Herr
patent: 4137867 (1979-02-01), Aigo
patent: 4165252 (1979-08-01), Gibbs
patent: 4170959 (1979-10-01), Aigo
patent: 4222834 (1980-09-01), Bacon et al.
patent: 4238310 (1980-12-01), Eckler et al.
patent: 4246088 (1981-01-01), Murphy et al.
patent: 4259166 (1981-03-01), Whitehurst
patent: 4269670 (1981-05-01), Smith
patent: 4276855 (1981-07-01), Seddon
patent: 4286541 (1981-09-01), Blackwood
patent: 4287029 (1981-09-01), Shimamura
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4310391 (1982-01-01), Okinaka et al.
patent: 4323433 (1982-04-01), Loch
patent: 4341629 (1982-07-01), Uhlinger
patent: 4360410 (1982-11-01), Fletcher et al.
patent: 4378283 (1983-03-01), Seyffert
patent: 4384930 (1983-05-01), Eckles
patent: 4391694 (1983-07-01), Runsten
patent: 4422915 (1983-12-01), Wielonski et al.
patent: 4431361 (1984-02-01), Bayne
patent: 4437943 (1984-03-01), Beck
patent: 4439243 (1984-03-01), Titus
patent: 4439244 (1984-03-01), Allevato
patent: 4440597 (1984-04-01), Wells et al.
patent: 4443117 (1984-04-01), Muramoto et al.
patent: 4449885 (1984-05-01), Hertel
patent: 4451197 (1984-05-01), Lange
patent: 4463503 (1984-08-01), Applegate
patent: 4466864 (1984-08-01), Bacon
patent: 4469564 (1984-09-01), Okinaka et al.
patent: 4469566 (1984-09-01), Wray
patent: 4475823 (1984-10-01), Stone
patent: 4480028 (1984-10-01), Kato et al.
patent: 4495153 (1985-01-01), Midorikawa
patent: 4495453 (1985-01-01), Inaba
patent: 4500394 (1985-02-01), Rizzo
patent: 4529480 (1985-07-01), Trokhan
patent: 4541895 (1985-09-01), Albert
patent: 4544446 (1985-10-01), Cady
patent: 4566847 (1986-01-01), Maeda
patent: 4576685 (1986-03-01), Goffredo et al.
patent: 4576689 (1986-03-01), Makkaev
patent: 4585539 (1986-04-01), Edson
patent: 4604177 (1986-08-01), Sivilotti
patent: 4604178 (1986-08-01), Fiegener
patent: 4634503 (1987-01-01), Nogavich
patent: 4639028 (1987-01-01), Olson
patent: 4648944 (1987-03-01), George
patent: 4652345 (1987-03-01), McBride et al.
patent: 4664133 (1987-05-01), Silvernail
patent: 4670126 (1987-06-01), Messer et al.
patent: 4685414 (1987-08-01), DiRico
patent: 4687552 (1987-08-01), Early et al.
patent: 4693017 (1987-09-01), Oehler et al.
patent: 4696729 (1987-09-01), Santini
patent: 4715934 (1987-12-01), Tamminen
patent: 4732785 (1988-03-01), Brewer
patent: 4741624 (1988-05-01), Barroyer
patent: 4750505 (1988-06-01), Inuta
patent: 4760671 (1988-08-01), Ward
patent: 4761214 (1988-08-01), Hinman
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4778572 (1988-10-01), Brown
patent: 4781800 (1988-11-01), Goldman
patent: 4790262 (1988-12-01), Nakayama
patent: 4800818 (1989-01-01), Kawaguchi et al.
patent: 4828654 (1989-05-01), Reed
patent: 4838289 (1989-06-01), Kottman
patent: 4849054 (1989-07-01), Klowak
patent: 4858539 (1989-08-01), Schumann
patent: 4864239 (1989-09-01), Casarcia et al.
patent: 4868992 (1989-09-01), Crafts et al.
patent: 4880511 (1989-11-01), Sugita
patent: 4898647 (1990-02-01), Luce et al.
patent: 4902398 (1990-02-01), Homstad
patent: 4903717 (1990-02-01), Sumnitsch
patent: 4906340 (1990-03-01), Brown
patent: 4906341 (1990-03-01), Yamakawa
patent: 4913085 (1990-04-01), Vohringer et al.
patent: 4924890 (1990-05-01), Giles et al.
patent: 4944650 (1990-07-01), Matsumoto
patent: 4948476 (1990-08-01), Kamperman et al.
patent: 4949671 (1990-08-01), Davis
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4959278 (1990-09-01), Shimauch
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 4979464 (1990-12-01), Kunze-Concewitz et al.
patent: 4982215 (1991-01-01), Matsuoka
patent: 4982753 (1991-01-01), Grebinski
patent: 4988533 (1991-01-01), Freeman
patent: 5000827 (1991-03-01), Schuster
patent: 5020200 (1991-06-01), Mimasaka
patent: 5024746 (1991-06-01), Stierman et al.
patent: 5026239 (1991-06-01), Chiba
patent: 5032217 (1991-07-01), Tanaka
patent: 5047126 (1991-09-01), Greenberg
patent: 5048589 (1991-09-01), Cook et al.
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5055036 (1991-10-01), Asano et al.
patent: 5061144 (1991-10-01), Akimoto
patent: 5069548 (1991-12-01), Boehnlein
patent: 5078852 (1992-01-01), Yee
patent: 5083364 (1992-01-01), Olbrich et al.
patent: 5096550 (1992-03-01), Mayer
patent: 5110248 (1992-05-01), Asano et al.
patent: 5115430 (1992-05-01), Hahne
patent: 5117769 (1992-06-01), DeBoer
patent: 5125784 (1992-06-01), Asano
patent: 5128912 (1992-07-01), Hug
patent: 5135636 (1992-08-01), Yee
patent: 5138973 (1992-08-01), Davis
patent: 5146136 (1992-09-01), Ogura
patent: 5151168 (1992-09-01), Gilton
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5156174 (1992-10-01), Thompson
patent: 5156730 (1992-10-01), Bhatt
patent: 5162179 (1992-11-01), Lewicki, Jr. et al.
patent: 5168886 (1992-12-01), Thompson et al.
patent: 5168887 (1992-12-01), Thompson et al.
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5172803 (1992-12-01), Lewin
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5178512 (1993-01-01), Skrobak
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Salaya et al.
patent: 5183377 (1993-02-01), Becker et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5209180 (1993-05-01), Shoda
patent: 5209817 (1993-05-01), Ahmad
patent: 5217586 (1993-06-01), Datta
patent: 5222310 (1993-06-01), Thompson
patent: 5224503 (1993-07-01), Thompson
patent: 5224504 (1993-07-01), Thompson et al.
patent: 5227041 (1993-07-01), Brogden
patent: 5228232 (1993-07-01), Miles
patent: 5228966
Hanson Kyle M.
McHugh Paul R.
Ritzdorf Thomas L.
Wilson Gregory J.
Ohriner Kenneth H.
Perkins Coie LLP
Semitool Inc.
Wilkins, III Harry D
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