Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-07-30
2008-10-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
07433040
ABSTRACT:
Disclosed is a method for determining an overlay error between at least two layers in a multiple layer sample. An imaging optical system is used to measure a plurality of measured optical signals from a plurality of periodic targets on the sample. The targets each have a first structure in a first layer and a second structure in a second layer. There are predefined offsets between the first and second structures. A scatterometry overlay technique is then used to analyze the measured optical signals of the periodic targets and the predefined offsets of the first and second structures of the periodic targets to thereby determine an overlay error between the first and second structures of the periodic targets.
REFERENCES:
patent: 3594085 (1971-07-01), Wilmanns
patent: 4103998 (1978-08-01), Nakazawa et al.
patent: 4167337 (1979-09-01), Jaerisch et al.
patent: 4200395 (1980-04-01), Smith et al.
patent: 4332473 (1982-06-01), Ono
patent: 4631416 (1986-12-01), Trutna, Jr.
patent: 4647207 (1987-03-01), Bjork
patent: 4703434 (1987-10-01), Brunner
patent: 4710642 (1987-12-01), McNeil
patent: 4750836 (1988-06-01), Stein
patent: 4757207 (1988-07-01), Chappelow et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4820055 (1989-04-01), Muller
patent: 4828392 (1989-05-01), Nomura et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4929083 (1990-05-01), Brunner
patent: 4999014 (1991-03-01), Gold et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5114235 (1992-05-01), Suda et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5172190 (1992-12-01), Kaiser
patent: 5182455 (1993-01-01), Muraki
patent: 5182610 (1993-01-01), Shibata
patent: 5189494 (1993-02-01), Muraki
patent: 5191393 (1993-03-01), Hignette et al.
patent: 5276337 (1994-01-01), Starikov
patent: 5316984 (1994-05-01), Leourx
patent: 5327221 (1994-07-01), Saitoh et al.
patent: 5340992 (1994-08-01), Matsugu et al.
patent: 5343292 (1994-08-01), Brueck et al.
patent: 5355306 (1994-10-01), Waldo
patent: 5388909 (1995-02-01), Johnson et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5416588 (1995-05-01), Ducharme et al.
patent: 5465148 (1995-11-01), Matsumoto et al.
patent: 5525840 (1996-06-01), Tominaga
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5596413 (1997-01-01), Stanton et al.
patent: 5608526 (1997-03-01), Pinwonka-Corle et al.
patent: 5666196 (1997-09-01), Ishii et al.
patent: 5712707 (1998-01-01), Ausschnitt et al.
patent: 5783342 (1998-07-01), Yamashita et al.
patent: 5801390 (1998-09-01), Shiraishi
patent: 5805290 (1998-09-01), Ausschnitt et al.
patent: 5808742 (1998-09-01), Everett et al.
patent: 5883710 (1999-03-01), Nikoonahad et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5909333 (1999-06-01), Best et al.
patent: 5912983 (1999-06-01), Hiratsuka
patent: 5923041 (1999-07-01), Cresswell et al.
patent: 5966201 (1999-10-01), Shiraishi et al.
patent: 6013355 (2000-01-01), Chen et al.
patent: 6023338 (2000-02-01), Bareket
patent: 6046094 (2000-04-01), Jost et al.
patent: 6077756 (2000-06-01), Lin et al.
patent: 6079256 (2000-06-01), Bareket
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6128089 (2000-10-01), Ausschnitt et al.
patent: 6153886 (2000-11-01), Hagiwara et al.
patent: 6160622 (2000-12-01), Dirksen et al.
patent: 6165656 (2000-12-01), Tomimatu
patent: 6177330 (2001-01-01), Yasuda
patent: 6197679 (2001-03-01), Hattori
patent: 6255189 (2001-07-01), Muller et al.
patent: 6323560 (2001-11-01), Narimatsu et al.
patent: 6342735 (2002-01-01), Colelli et al.
patent: 6350548 (2002-02-01), Leidy et al.
patent: 6420791 (2002-07-01), Huang et al.
patent: 6420971 (2002-07-01), Leck et al.
patent: 6421124 (2002-07-01), Matsumoto et al.
patent: 6445453 (2002-09-01), Hill
patent: 6458605 (2002-10-01), Stirton
patent: 6462818 (2002-10-01), Bareket
patent: 6476920 (2002-11-01), Scheiner et al.
patent: 6486954 (2002-11-01), Mieher et al.
patent: 6522406 (2003-02-01), Rovira et al.
patent: 6590656 (2003-07-01), Xu et al.
patent: 6611330 (2003-08-01), Lee et al.
patent: 6633831 (2003-10-01), Nikoonahad et al.
patent: 6699624 (2004-03-01), Niu et al.
patent: 6713753 (2004-03-01), Rovira et al.
patent: 6767680 (2004-07-01), Schulz
patent: 6772084 (2004-08-01), Bischoff et al.
patent: 6813034 (2004-11-01), Rosencwaig et al.
patent: 6815232 (2004-11-01), Jones et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 6867870 (2005-03-01), Mihaylov et al.
patent: 6888632 (2005-05-01), Smith
patent: 6900892 (2005-05-01), Shchegrov et al.
patent: 6919964 (2005-07-01), Chu
patent: 6949462 (2005-09-01), Yang et al.
patent: 6982793 (2006-01-01), Yang et al.
patent: 6992764 (2006-01-01), Yang et al.
patent: 7042569 (2006-05-01), Sezginer et al.
patent: 7046361 (2006-05-01), Yang et al.
patent: 7046376 (2006-05-01), Sezginer
patent: 7061615 (2006-06-01), Lowe-Webb
patent: 7061623 (2006-06-01), Davidson
patent: 7061627 (2006-06-01), Opsal et al.
patent: 7080330 (2006-07-01), Choo et al.
patent: 7193715 (2007-03-01), Smedt et al.
patent: 7242477 (2007-07-01), Mieher et al.
patent: 7280212 (2007-10-01), Mieher et al.
patent: 7280230 (2007-10-01), Shchegrov et al.
patent: 7289213 (2007-10-01), Mieher et al.
patent: 7298481 (2007-11-01), Mieher et al.
patent: 7301634 (2007-11-01), Mieher et al.
patent: 7317531 (2008-01-01), Mieher et al.
patent: 2002/0054290 (2002-05-01), Vurens et al.
patent: 2002/0072001 (2002-06-01), Brown et al.
patent: 2002/0093648 (2002-07-01), Nikoonahad et al.
patent: 2002/0135875 (2002-09-01), Niu et al.
patent: 2002/0149782 (2002-10-01), Raymond
patent: 2002/0158193 (2002-10-01), Sezginer et al.
patent: 2002/0192577 (2002-12-01), Fay et al.
patent: 2003/0002043 (2003-01-01), Abdulhalim et al.
patent: 2003/0011786 (2003-01-01), Levy et al.
patent: 2003/0020184 (2003-01-01), Ballarin
patent: 2003/0156276 (2003-08-01), Bowes
patent: 2003/0223630 (2003-12-01), Adel et al.
patent: 2004/0129900 (2004-07-01), Den Boef et al.
patent: 2004/0233440 (2004-11-01), Mieher et al.
patent: 2004/0233442 (2004-11-01), Mieher et al.
patent: 2005/0012928 (2005-01-01), Sezginer et al.
patent: 2005/0122516 (2005-06-01), Sezgmer et al.
patent: 2005/0157297 (2005-07-01), Abdulhalim et al.
patent: 2005/0286051 (2005-12-01), Sezginer et al.
patent: 2006/0050283 (2006-03-01), Hill
patent: 2006/0193630 (2006-08-01), Dishon et al.
patent: 2007/0105029 (2007-05-01), Ausschnitt
patent: 2008/0024766 (2008-01-01), Mieher et al.
patent: 2008/0049226 (2008-02-01), Mieher et al.
patent: 1400855 (2004-03-01), None
patent: 60-126881 (1986-07-01), None
patent: 63-248804 (1988-10-01), None
patent: 11-86332 (1999-03-01), None
patent: WO 85/04266 (1985-09-01), None
patent: WO 95/02200 (1995-01-01), None
patent: WO 99/45340 (1999-09-01), None
patent: WO 99/56174 (1999-11-01), None
patent: WO 01/84382 (2001-11-01), None
patent: WO 01/97279 (2001-12-01), None
patent: WO 02/15238 (2002-02-01), None
patent: WO 02/18871 (2002-03-01), None
patent: WO 02/25708 (2002-03-01), None
patent: WO 02/25723 (2002-03-01), None
patent: WO 02/35300 (2002-05-01), None
patent: WO 02/50509 (2002-06-01), None
patent: WO 02/065545 (2002-08-01), None
patent: WO 02/065545 (2002-08-01), None
patent: WO 02/069390 (2002-09-01), None
patent: WO 02/084213 (2002-10-01), None
patent: WO 02/084213 (2002-10-01), None
patent: WO 03/001297 (2003-01-01), None
patent: WO 03/042629 (2003-05-01), None
patent: WO 03/054475 (2003-07-01), None
patent: WO 2004/053426 (2004-06-01), None
patent: WO 2004/076963 (2004-09-01), None
Kim, Young-Chang et al., “Automatic In-Situ Focus Monitor Using Line Shortening Effect,” Journal: Proceedings of the SPIE, vol. 3677, pt. 1-2, pp. 184-193, Mar. 1999.
Sherman, Enrique R., “Characterization and Monitoring of Variable NA and Variable Coherence Capable Photo Steppers Utilizing the Phase Shift Focus Monitor Reticle,” Journal: Proceedings of the SPIE, vol. 2439, pp. 61-69.
Bischoff, Jorg et al., “Modeling of Optical Scatterometry with Finite-Number-of-Periods Grating,” Journal: Proceedings of the SPIE, vol. 3743, pp. 41-48.
Uchida, Norio et al., “A Mask to Wafer Alignment and Gap
Adel Michael E.
Bevis Christopher F.
Fabrikant Anatoly
Friedmann Michael
Ghinovker Mark
KLA-Tencor Technologies Corp.
Stock, Jr. Gordon J
Toatley , Jr. Gregory J.
Weaver Austin Villeneuve & Sampson LLP
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