Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate
2010-10-05
2011-10-04
Smith, Matthew (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
C257S030000, C257S031000, C257S635000, C257SE21169, C257SE21295, C438S098000, C438S768000, C438S785000, C438S014000, C438S007000
Reexamination Certificate
active
08030725
ABSTRACT:
Apparatus and methods for detecting evaporation conditions in an evaporator for evaporating metal onto semiconductor wafers, such as GaAs wafers, are disclosed. One such apparatus can include a crystal monitor sensor configured to detect metal vapor associated with a metal source prior to metal deposition onto a semiconductor wafer. This apparatus can also include a shutter configured to remain in a closed position when the crystal monitor sensor detects an undesired condition, so as to prevent metal deposition onto the semiconductor wafer. In some implementations, the undesired condition can be indicative of a composition of a metal source, a deposition rate of a metal source, impurities of a metal source, position of a metal source, position of an electron beam, and/or intensity of an electron beam.
REFERENCES:
patent: 5753934 (1998-05-01), Yano et al.
patent: 2003/0017717 (2003-01-01), Ahn et al.
Bingle Richard S.
Knoedler Heather L.
Luu Lam T.
Weaver Daniel C.
Baptiste Wilner Jean
Knobbe Martens Olson & Bear LLP
Skyworks Solutions Inc.
Smith Matthew
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