Apparatus and methods for detecting and correcting distortion of

Details Apparatus and methods for detecting and correcting distortion of Apparatus and methods for detecting and correcting distortion of

1997-09-17

1999-12-28

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356359, G01B 902

Patent

active

060089040

ABSTRACT:
Wavefront aberration-measuring apparatus are disclosed that can easily and accurately correct interference-fringe distortions arising from aberrations of an optical system in an interferometer and that can reduce wavefront aberration-measurement errors arising from such distortion. The apparatus comprise an interferometer that forms an interference fringe from a synthesis of a wavefront of light reflecting from a reference surface and a wavefront of light from a test object (such as a reflective surface or lens). The apparatus also comprises an image-pickup element for detecting the interference fringe, and an arithmetical calculator that calculates the wavefront aberration between the test object and the reference surface based on an output from the image-pickup element. Between the test object and the image-pickup element is an optical system (e.g., converging lens) that transmits a wavefront that is perpendicularly incident to a surface of the test object. An interference-fringe distortion corrector corrects the interference-fringe distortion based on a distortion aberration calculated in advance.

REFERENCES:
patent: 4917498 (1990-04-01), Geary
patent: 5033855 (1991-07-01), Matsui
patent: 5561525 (1996-10-01), Toyonaga et al.

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