Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1999-02-02
2000-02-29
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356357, G01B 1124
Patent
active
060316128
ABSTRACT:
Apparatus and methods of measuring position information of a point on the surface of an object. In one embodiment, the apparatus includes two sources of radiation positioned to illuminate the point on the surface of the object with radiation from each of the sources. The radiation from each of the sources is coherent with respect to the radiation from the other source. A control system moves each of the sources relative to the other and changes the phase of the radiation from at least one of the sources relative to the phase of the radiation from the other source as measured at the point on the surface of the object. A detector is positioned to receive radiation scattered by the point and a processor in communication with the detector calculates position information in response to the change in phase of the radiation from the source and the received radiation scattered by the point on the surface of the object.
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Font Frank G.
Massachusetts Institute of Technology
Smith Zandra
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