Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2008-03-18
2008-03-18
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C250S559450
Reexamination Certificate
active
07345753
ABSTRACT:
Disclosed are methods and apparatus for facilitating procedures implemented on an analysis tool are provided herein. In one embodiment, an apparatus includes an analyzer module arranged for managing an analyzer tool and causing a high resolution image generated by the analyzer tool to be presented in a display. The apparatus also includes an inspector interface module arranged for simulating an inspector interface in the display. The inspector interface includes features that are available on a corresponding inspection tool, and the inspector interface is based at least in part on defect results from the inspection tool. In one embodiment, the analyzer module executes without knowledge of the inspector interface module and visa versa, and the apparatus includes a synchronization mechanism that knows about these two modules and also is capable of communicating with these two modules.
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Bhaskar Kris
Liang Ardis
Van Riet Michael J.
Beyer & Weaver, LLP
KLA-Tencor Technologies Corporation
Toatley , Jr. Gregory J.
Ton Tri
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