Apparatus and method to enhance X-ray production in laser produc

Details Apparatus and method to enhance X-ray production in laser produc Apparatus and method to enhance X-ray production in laser produc

1990-08-22

1992-12-29

Howell, Janice A.

X-ray or gamma ray systems or devices

Source

Nuclear excited

378119, 378143, H01J 3508

Patent

active

051757575

ABSTRACT:
Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.

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