Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1989-04-26
1990-10-23
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 731, 324158F, 358106, G01R 3128
Patent
active
049655159
ABSTRACT:
An apparatus and method of testing semiconductor wafer, which are capable of properly processing inking errors caused in the process of determining whether the chips are good or bad. The apparatus comprises an inker for markings those chips which have been found defective by probing test, a TV camera for imaging the chips including those which have been found defective and marked, a computer system for comparing an image-signal with a reference-signal, and determining that the chip has no marking when the signals coincide and that the chip has a marking when the signals do not coincide, and a counter for counting those chips which have been determined to have markings or no marking by the computer system.
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Karlsen Ernest F.
Tokyo Electron Limited
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