Apparatus and method of producing dual ion/electron source

Details Apparatus and method of producing dual ion/electron source Apparatus and method of producing dual ion/electron source

1998-05-08

1999-11-02

Nguyen, Kiet T.

Radiant energy

Ion generation

Field ionization type

250424, 250423F, H01J 3726

Patent

active

059775491

ABSTRACT:
An apparatus and a method of producing a dual ion/electron source. The ion beam and the electron beam are produced by a charged particle optical system. Using an ion source metal to emit an ion beam or an electron beam. The direction of the ion beam and the electron beam is identical. Neither the particle source nor the sample need to be rotated or shifted.

REFERENCES:
patent: 4617203 (1986-10-01), Jergenson
patent: 4638217 (1987-01-01), Okubo et al.
patent: 4740698 (1988-04-01), Tamura et al.
patent: 4835399 (1989-05-01), Hosaka et al.

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