Apparatus and method of measuring acoustical energy applied...

Measuring and testing – Vibration – By mechanical waves

Reexamination Certificate

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C073S001480, C073S649000, C310S31300R

Reexamination Certificate

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07836769

ABSTRACT:
An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.

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