Apparatus and method of improving impedance matching between...

Details Apparatus and method of improving impedance matching between... Apparatus and method of improving impedance matching between...

2006-09-19

2006-09-19

Niebling, John F. (Department: 2812)

Demodulators

Phase modulation demodulator

Input signal combined with local oscillator or carrier...

Reexamination Certificate

active

07109788

ABSTRACT:
An apparatus and method of improving impedance matching between a RF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RF signal, and matches an impedance of the RF signal with an impedance of the electrode segment, where the RF signal is modulated prior to matching of the impedance of the RF signal. The apparatus and method directionally couples an output of the matching of the impedance of the RF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.

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