Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
Patent
1990-06-29
1991-10-22
Ryan, Patrick J.
Stock material or miscellaneous articles
Structurally defined web or sheet
Discontinuous or differential coating, impregnation or bond
428209, 4284111, 428426, 428432, 428446, 428447, 428901, 65 312, 385 14, 385130, B32B 900
Patent
active
050594753
ABSTRACT:
An integrated optoelectrical circuit is described. An apparatus and method are disclosed whereby planar optical waveguides are formed on Al.sub.2 O.sub.3, other ceramics, silicon, silica, and other glass substrates that are thin film wired. An interface coating of silicon or silicon dioxide is applied to a surface of the thin film wired substrates using a low temperature deposition process such as sputtering or chemical vapor deposition. Glass cladding and core layers are deposited onto the thin film coating using a flame hydrolysis deposition technique. With this invention, channel waveguides and integrated optical circuits can be formed on a common substrate with electronic IC chips.
REFERENCES:
patent: 3873339 (1975-03-01), Hudson
patent: 3933454 (1976-01-01), DeLuca
patent: 3934061 (1976-01-01), Keck et al.
patent: 4125388 (1978-11-01), Powers
patent: 4157906 (1979-06-01), Bailey
patent: 4203744 (1980-05-01), Schultz et al.
patent: 4236930 (1980-12-01), Macedo et al.
patent: 4263031 (1981-04-01), Schultz
patent: 4298365 (1981-11-01), Bailey et al.
patent: 4453961 (1984-06-01), Berkey
patent: 4486212 (1984-12-01), Berkey
patent: 4664473 (1987-05-01), Gannon
patent: 4695122 (1987-09-01), Ishida et al.
patent: 4701008 (1987-10-01), Richard et al.
patent: 4705346 (1987-11-01), Miyawaki
patent: 4729618 (1988-03-01), Yoshida et al.
patent: 4762382 (1988-08-01), Husain et al.
"Optical Interconnections for Massively Parallel Architectures", Applied Optics, vol. 29, No. 8, Mar. 10, 1990, pp. 1077-1093, by Aloke Guha, et al.
"Optical Interconnections for VLSI Systems", Proceedings of the IEEE, vol. 72, No. 7, Jul. 1984, by Joseph W. Goodman, et al.
"Optical Interconnects Replace Hardwire", IEEE Spectrum, Mar. 1987, by Lynn D. Hutcheson, et al.
"Flame Hydrolysis Deposition of SiO.sub.2 -TiO.sub.2 Glass Planar Optical Waveguides on Silicon", Japan Journal of Applied Physics, vol. 22, No. 12, 1983 by Masao Kawachi, et al.
"Fabrication of SiO.sub.2 -TiO.sub.2 Glass Planar Optical Waveguides by Flame Hydrolysis Deposition", Electronic Letters, vol. 19, No. 15, pp. 583-584, Jul. 1983, by M. Kawachi, et al.
"Stress Measurements of Thermally Grown Thin Oxides on Si Substrates", Journal of Electrochemical Society, vol. 136, No. 11, Nov. 1989, by L. M. Mack, et al.
"Handbook of Glass Properties", 1986, by Narattam P. Bansal and R. H. Doremus, p. 363.
Miyashita Tadashi
Sakaguchi Shigeki
Sun Cheng-ko J.
Photonic Integration Research, Inc.
Ryan Patrick J.
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