Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2007-04-24
2007-04-24
Epps, Georgia (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S227110, C073S105000, C324S758010
Reexamination Certificate
active
11266678
ABSTRACT:
We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having a first end and a second end; a beam splitter having first and second output ports; and a light source connected to the beam splitter. The first output port of the beam splitter is connected to the first end of the fiber-optic cable, and the second output port of the beam splitter is connected to a photodiode. The second end of the fiber-optic cable has a mirror for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable and onto the capsule, so that the intensity of the light reflected back from the capsule through the fiber-optic cable is proportional to the deflection of the capsule as the probe tip makes contact with the surface.
REFERENCES:
patent: 5324935 (1994-06-01), Yasutake
patent: 5479024 (1995-12-01), Hillner et al.
patent: 5991040 (1999-11-01), Doemens et al.
patent: 6570156 (2003-05-01), Tsuneta et al.
patent: 6576910 (2003-06-01), Hashikawa et al.
patent: 6617569 (2003-09-01), Narita et al.
patent: 6668628 (2003-12-01), Hantschel et al.
patent: 6713743 (2004-03-01), Kim et al.
patent: 6717156 (2004-04-01), Sugaya et al.
patent: 6744268 (2004-06-01), Hollman
patent: 6879407 (2005-04-01), Inoue et al.
patent: 6888139 (2005-05-01), Tsuneta et al.
patent: 7057154 (2006-06-01), Kitamura et al.
patent: 2002/0056808 (2002-05-01), Tsuneta et al.
patent: 2002/0122186 (2002-09-01), Igaki et al.
patent: 2002/0195576 (2002-12-01), Inoue et al.
patent: 2003/0217772 (2003-11-01), Lu et al.
patent: 2003/0236586 (2003-12-01), Tomimatsu et al.
patent: 2004/0051878 (2004-03-01), Schick
patent: 2004/0061872 (2004-04-01), Nakano
patent: 2004/0129868 (2004-07-01), Kilmartin
patent: 2004/0144924 (2004-07-01), Asselbergs et al.
patent: 2004/0151417 (2004-08-01), Lagakos et al.
patent: 2004/0251412 (2004-12-01), Tappel
patent: 2004/0251413 (2004-12-01), Suzuki et al.
patent: 2005/0035302 (2005-02-01), Morrison
patent: 2005/0054115 (2005-03-01), Von Harrach et al.
patent: 11044693 (1999-02-01), None
McGlade, S. M. and Jones, G. R., An Optically Powered Vibrating Quartz Force Sensor, GEC Journal of Research, vol. 2, No. 2, 1984.
Karrai, Khaled, Grober, Robert D., Piezo-electric tuning fork tip-sample distance control for near field optical microscopes, Ultramicroscopy 61 (1995) 197-205.
Bauer, P., Hecht, B., Rossel, C., Piezoresistive cantilevers as optical sensors for scanning near-field microscopy, Ultramicroscopy 61 (1995) 127-130.
Clijnen, J., Reynaerts, D., Van Brussel H., Design of an optical tri-axial force sensor, Katholieke Universiteit Leuven, Department of Mechanical Engineering.
Moore Thomas
Zaykova-Feldman Lyudmila
Epps Georgia
Livedalen Brian J.
Omniprobe, Inc.
Thomas John A.
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