Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-12-24
1999-05-11
Brock, Michael
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
G01R31/26
Patent
active
059031638
ABSTRACT:
An apparatus and method for controlling the environmental conditions surrounding an integrated circuit device during performance testing is disclosed. The apparatus includes a housing having an inlet and outlet, a test assembly having a plurality of device test sites, a heat transfer medium source connected to the inlet, a negative pressure source connected to the outlet to promote flow of the heat transfer medium from the inlet to the outlet, and at least one flow resistance member positioned between the test sites and the outlet to control the flow of the heat transfer medium proximate to the test sites. In a preferred embodiment the flow resistance member is integral with the test assembly and the test sites have at least one flow path through each of the test sites serving as the flow resistance member and sized to provide for a uniform flow field in the vicinity of the test sites. In the practice of the invention, the resistance member is positioned such that upon the application of a negative pressure on the outlet of the housing a uniform flow and pressure field develops in the vicinity of the test sites and devices.
REFERENCES:
patent: 4881591 (1989-11-01), Rignall
patent: 4967155 (1990-10-01), Magnuson
patent: 5582235 (1996-12-01), Hamilton et al.
Nevill Leland R.
Tverdy Mark A.
Brock Michael
Micro)n Technology, Inc.
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