Apparatus and method of controlling...

Data processing: artificial intelligence – Neural network – Learning task

Reexamination Certificate

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C700S042000, C700S044000, C700S045000, C700S048000, C700S053000

Reexamination Certificate

active

07152052

ABSTRACT:
An apparatus and method is disclosed for automatically controlling single-input-multi-output (SIMO) systems or processes. The control output signals of a plurality of single-input-single-output (SISO) automatic controllers are combined by a combined output setter so that these SISO controllers are converted to a multi-input-single-output (MISO) automatic controller based on certain criteria; and its resulting controller output signal is able to manipulate only one actuator to control a plurality of continuous process variables or attempt to minimize a plurality of error signals between the setpoints and their corresponding process variables. Without the need of building process mathematical models, this inventive apparatus and method is useful for automatically controlling unevenly paired multivariable systems or processes where there are less system inputs than outputs including but not limited to industrial furnaces, rapid thermal processing (RTP) chambers, chemical mechanical planarization (CMP) systems, and distillation columns.

REFERENCES:
patent: 6055524 (2000-04-01), Cheng
patent: 6360131 (2002-03-01), Cheng
patent: 6556980 (2003-04-01), Cheng
patent: 6622521 (2003-09-01), Seiver et al.
patent: 6684112 (2004-01-01), Cheng
patent: 6684115 (2004-01-01), Cheng
patent: 6970750 (2005-11-01), Wojsznis et al.
patent: 2002/0017113 (2002-02-01), Seiver et al.
patent: 2005/0004687 (2005-01-01), Cheng
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“PID Controller”, eCircuit Center, http://www.ecircuitcenter.com/Circuits/pid1/pid1.htm.
USPTO Filing Receipt mailed Jul. 3, 2003, Specification and Drawings of U.S. Appl. No. 60/474,688, filed on May 30, 2003, applicant: George Shu-Xing Cheng.
USPTO Filing Receipt mailed Nov. 5, 2003, Specification and Drawings of U.S. Appl. No. 60/494,488, filed on Aug. 12, 2003; applicant: George Shu-Xing Cheng.
USPTO Filing Receipt mailed Dec. 2, 2004, Specification, Claims and Drawings of U.S. Appl. No. 10/969,485, filed on Oct. 19, 2004, applicants: George Shu-Xing Cheng and Steven L. Mulkey.
USPTO Filing Receipt mailed Dec. 12, 2003, Specification and Drawings of U.S. Appl. No. 60/513,126, filed on Oct. 20, 2003, applicants: George Shu-Xing Cheng and Steven L. Mulkey.

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