Apparatus and method of checking the thickness and uniformity of

Details Apparatus and method of checking the thickness and uniformity of Apparatus and method of checking the thickness and uniformity of

1993-06-25

1995-05-23

Wieder, Kenneth A.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324675, G01R 2726

Patent

active

054184673

ABSTRACT:
This invention concerns an apparatus for checking the thickness and uniformity of a coating made of conducting material deposited on an elongated insulating body, this apparatus comprising:

REFERENCES:
patent: 3748577 (1973-07-01), Jones
patent: 3801900 (1974-04-01), Szasz
patent: 3812424 (1974-05-01), Abbe
patent: 4706014 (1987-11-01), Fabbri
patent: 5198777 (1993-03-01), Masuda et al.
patent: 5231359 (1993-07-01), Masuda et al.
patent: 5241280 (1993-08-01), Aidun et al.
Measurement Techniques, vol. 32, No. 7, Jul. 1989, New York, US, pp. 647-649, V. K. Fedotov: "capacitance thickness gauge for conducting films".

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