Apparatus and method of automatically removing a wafer carrier f

Details Apparatus and method of automatically removing a wafer carrier f Apparatus and method of automatically removing a wafer carrier f

1997-02-21

1999-11-16

Bryant, David P.

Metal working

Method of mechanical manufacture

Disassembling

414940, 414814, B23P 1900

Patent

active

059834790

ABSTRACT:
First and second pairs of jaws are located above the second pair by a predetermined amount. The first pair of jaws is arranged to grasp the lid of a container while the second pair of jaws is arranged to grasp a carrier disposed in the container. A vertically extending column is adapted to be moved laterally along a predetermined path and for supporting the first and second pairs of jaws. A jaw vertically moving controller is provided so as to lift and lower the first and second pairs of jaws along the column. On the other hand, a jaw controller is provided so as to selectively and respectively open and close the first and second pairs of jaws.

REFERENCES:
patent: 3938846 (1976-02-01), Yuryan
patent: 5028195 (1991-07-01), Ishii et al.
patent: 5123804 (1992-06-01), Ishii et al.
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5498118 (1996-03-01), Nakahara
patent: 5628604 (1997-05-01), Murata et al.

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