Apparatus and method integrating an electro-osmotic pump and...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support

Reexamination Certificate

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C438S125000, C257SE21499, C257SE23098

Reexamination Certificate

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07569426

ABSTRACT:
A die package and a method and apparatus for integrating an electro-osmotic pump and a microchannel cooling assembly into a die package.

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