Apparatus and method for wavefront absolute calibration and meth

Details Apparatus and method for wavefront absolute calibration and meth Apparatus and method for wavefront absolute calibration and meth

1998-02-04

1999-11-09

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, 356351, G01B 902

Patent

active

059824905

ABSTRACT:
A method is provided for deriving an absolute surface profile of an object having a rotationally symmetric component and a rotationally asymmetric component using a detection system for measuring a relative surface profile of the object with respect to a predetermined reference surface. The method includes the steps of positioning the object to a first predetermined position relative to the detection system, rotating the object around a predetermined measurement axis of rotation at the first predetermined position, acquiring data indicating the relative surface profile of the object with respect to the predetermined reference surface at each of a plurality of rotational positions of the object during the rotating step, averaging the data acquired in the acquiring step over the plurality of rotational positions to derive a rotationally averaged data, and processing the rotationally averaged data and the data indicating the relative surface profile of the object at at least one of the plurality of rotational positions of the object to derive the rotationally asymmetric component of the absolute surface profile of the object. The method further includes the steps of translating the object to a second predetermined position relative to the detection system, acquiring data indicating the relative surface profile of the object at the second predetermined position, and processing the data indicating the relative surface profile of the object at the second predetermined position and at least one of the rotationally averaged data and the data indicating the relative surface profile at at least one of the plurality of rotational positions of the object to derive the rotationally symmetric component of the absolute surface profile of the object, the data processing using a polynomial best fitting method for the data indicating the relative surface profile at the second predetermined position.

REFERENCES:
Grzanna et al, "Absolute Testing of Flatness Standards at Square-Grid Points", Optics Communications, pp. 107-112, Jun. 1990.
E.A. Lord, et al., "The Mathmatical Description of Shape and Form", published 1984 by Ellis Horwood Limited, p. 202.

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