Apparatus and method for washing polycrystalline silicon

Details Apparatus and method for washing polycrystalline silicon Apparatus and method for washing polycrystalline silicon

2011-03-15

2011-03-15

Carrillo, Sharidan (Department: 1711)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S018000, C134S025100, C134S025400, C134S025500, C134S026000, C134S030000, C134S032000, C134S034000, C134S035000, C134S036000, C134S042000

Reexamination Certificate

active

07905963

ABSTRACT:
Disclosed is a polycrystalline silicon washing apparatus that sequentially immerses polycrystalline silicon into a plurality of acid baths each of which is filled with an acid to wash the polycrystalline silicon. The temperatures of the acids in the acid baths are set such that the temperature of the acid in a later acid bath of adjacent acid baths is equal to or lower than that of a former acid bath and the temperature of the acid in the last acid bath is lower than that of the acid in the first acid bath. Each of the acid baths is provided with a temperature adjusting unit that controls the temperature of the acid at a constant value.

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