Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent
1998-02-23
1999-11-16
Warden, Jill
Cleaning and liquid contact with solids
Processes
For metallic, siliceous, or calcareous basework, including...
134 13, 134 6, 134 18, 134 19, 134 254, 134 255, 134 26, 134 32, 134902, 15 211, 15 77, 15 882, 15 883, B08B 300
Patent
active
059850396
ABSTRACT:
An apparatus and method for scrubbing both surfaces of a substrate which includes a process section having a first unit, a second unit, a main arm mechanism for transferring a substrate into/from the first and second units, a first cassette or a second cassette section for transferring plural cassettes, a first and second sub-arm for transferring a substrate into/from the cassette sections, and controllers, such that a first substrate taken out from the first cassette section is subjected to the first unit and then subjected to the second unit, while a second substrate taken out from the second cassette is subjected to the second unit and then subjected to the first unit.
REFERENCES:
patent: 5345639 (1994-09-01), Tanoue et al.
patent: 5485644 (1996-01-01), Shinbara et al.
patent: 5498294 (1996-03-01), Matsushita et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5651160 (1997-07-01), Yonemizu et al.
patent: 5779796 (1998-07-01), Tomoeda et al.
Matsuyama Yuji
Yonemizu Akira
Carrillo S.
Tokyo Electron Limited
Warden Jill
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