Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2000-03-02
2003-02-18
Bratlie, Steven A. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S416100, C414S937000, C414S939000
Reexamination Certificate
active
06520726
ABSTRACT:
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
N/A
BACKGROUND OF THE INVENTION
There is a need in the electronics industry to carefully handle substrates in a mechanized manner. The term substrate includes such devices as semiconductor wafers, liquid crystal displays, flat panel displays, disk drives, and the like. Substrates are typically stored and transported in a substrate carrier. As its name implies, the term substrate carrier refers to a device that holds a set of substrates. The electronics industry utilizes a variety of substrate carriers, which are referenced by different names. For example, a substrate carrier includes a cassette, which is an open structure that holds one or more substrates. A substrate carrier also includes a box, which is a protective portable container for a cassette and/or substrates. A substrate carrier also includes a “pod”, which is a box having a standard mechanical interface defined by an industry standard. The electronics industry also utilizes substrate carriers in the form of “FOUPs” (Front Opening Unified Pods), which are boxes or pods used to transport and store 300 mm semiconductor wafers.
FIG. 1
illustrates a prior art substrate processing system
10
. A substrate carrier
20
is positioned on a load port
22
via a kinematic coupling
24
. A substrate carrier door
26
positioned on the substrate carrier
20
provides access to a substrate transport chamber or module
30
, which typically is environmentally controlled. The chamber
30
is sealed by a port door
31
. The carrier door
26
couples to the port door
31
, so that any particles on the external surface of either door are trapped between the door. A robot
32
is positioned within the substrate transport module
30
. The robot
32
is used to remove and insert substrates
33
into the substrate carrier
20
after the substrate carrier door
26
has been removed. The robot
32
moves the substrates
33
to different substrate stations
34
where they are processed in accordance with known techniques.
The Semiconductor Equipment Manufacturing Industry (SEMI) has adopted a number of standards that define acceptable configurations for semiconductor processing equipment. These SEMI standards define configurations for the kinematic coupling
24
, substrate carrier door
26
, pods, FOUPS, and other substrate carriers, and the latching mechanism between the carrier door
26
and the port door
31
.
A door handler
36
is used in the prior art to remove a substrate carrier door
26
and port door
31
latched together. The door handler
36
is controlled by door handler control electronics
38
. The door handler
36
and door handler control electronics
38
constitute dedicated devices that serve the purpose of removing the substrate carrier door
26
coupled to the port door
31
. They also act as the interface between the factory automation system and the tool, and communicate status to the tool and/or fab host. These devices add considerable expense and complexity to a substrate processing system
10
. This expense and complexity is compounded in the case where the substrate transport module
30
has multiple load ports
22
, each of which requires a separate door handler
36
and associated door handler electronics
38
.
Accordingly, it would be highly desirable to provide a substrate transport system
10
that does not require multiple door handles
36
and associated door handler electronics
38
. Ideally, such a system would remain largely compliant with relevant SEMI standards.
BRIEF SUMMARY OF THE INVENTION
The apparatus of the invention includes a substrate transport system that may be employed with a substrate transport chamber or module, which typically is environmentally controlled. A robot is positioned within the substrate transport chamber or transport module. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key control assembly operative to manipulate one or, more typically, two door keys. The drive mechanism provides mechanical control of the door key control assembly such that the door key or keys are manipulated to couple a substrate carrier door to a port door and release the substrate carrier door from the substrate. The drive mechanism is further operative to place the coupled doors in a storage location within the chamber or module. The drive mechanism may also include a substrate handling paddle, thereby allowing the robot to transport substrates within the substrate chamber or module.
The method of the invention includes the step of removing a substrate carrier door coupled to the port door from a substrate carrier with a substrate carrier door removal device positioned on a robot. The robot is then operated to store the coupled substrate carrier door and port door. Alternatively, the robot can carry the coupled doors with it. Subsequently, the robot is manipulated to transport a substrate positioned within the substrate carrier to a substrate processing or transport station or another loading station.
The system of the invention eliminates the need for dedicated door handlers and associated door handler electronics. Advantageously, the system can be constructed in accordance with relevant SEMI standards.
REFERENCES:
patent: 4842680 (1989-06-01), Davis et al.
patent: 5451131 (1995-09-01), Hecht et al.
patent: 5607276 (1997-03-01), Muka et al.
patent: 5609459 (1997-03-01), Muka
patent: 5613821 (1997-03-01), Muka et al.
patent: 5615988 (1997-04-01), Wiesler et al.
patent: 5664925 (1997-09-01), Muka et al.
patent: 5711427 (1998-01-01), Nyseth
patent: 6142722 (2000-11-01), Genov et al.
Aalund Martin P.
Chidlow Craig
Cook Gregory
Gomez J. Rafael
Nugyen Lang Van
Bratlie Steven A.
PRI Automation, Inc.
Weingarten Schurgin, Gagnebin & Lebovici LLP
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