Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized
Patent
1991-12-23
1993-07-20
Owens, Terry J.
Coating processes
Direct application of electrical, magnetic, wave, or...
Electrostatic charge, field, or force utilized
118 501, 118627, 118629, 239 3, 239 4, 2391022, 239690, 427485, 427510, 430935, B05D 104
Patent
active
052291715
ABSTRACT:
An apparatus and method including a droplet coating generator for generating a stream of electrically charged coating droplets within an evacuable chamber towards a substrate positioned within the evacuable chamber. A piezoelectric vibrator and orifice plate coupled thereto generate the stream of coating droplets. The coating droplets are urged to move in a sweeping motion across the substrate by at least one pair of opposing spaced apart electrodes powered by an electrical power supply. A uniform coating is thus produced while the evacuable chamber is maintained at subatmospheric pressure as required during typical semiconductor processing. Multiple applications of a photoresist coating may be applied by the coating apparatus without requiring that the evacuable chamber be repeatedly vented and pumped down to subatmospheric pressure.
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Periasamy, Clayton, Donovan & Ensor, Generation of Uniformly Sized, Charged Particles in Vaccum, Aerosol Science and Technology, vol. 15/#3, (21 pages), (Oct. 1991).
Clayton Anthony C.
Donovan Robert P.
Ensor David S.
Periasamy Ravindran
Owens Terry J.
Research Triangle Institute
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