Electric heating – Metal heating – By arc
Patent
1991-12-23
1994-04-12
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912141, 219695, 156345, 20429838, B23K 900, H05H 146
Patent
active
053028031
ABSTRACT:
A plasma processing apparatus and method using a predetermined proportion of relative power between a TE.sub.11 mode and a TM.sub.01 mode to produce radial uniformity of the plasma. A microwave coupler transforms microwave energy from a microwave source into approximately equal proportions of TE.sub.11 and TM.sub.01 modes. In one embodiment, the coupler includes a first arm for generating the TE.sub.11 mode and a second arm for generating the TM.sub.01 mode which are then combined in a cylindrical waveguide section having a sufficient inner diameter to support propagation of both modes. Other circuit components are provided to prevent cross-coupling of the TE.sub.11 mode into the TM.sub.01 generating arm, and vice versa. Thus, the relative proportion of power of each mode may be independently controlled. A magnetic field generator may be used in the apparatus to create an electron cyclotron resonance condition within the plasma.
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Cecchi Joseph L.
Stevens James E.
Consortium for Surface Processing, Inc.
Paschall Mark H.
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