Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Utilizing subatmospheric or superatmospheric pressure during...
Reexamination Certificate
2005-01-11
2005-01-11
Koehler, Robert R. (Department: 1775)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Utilizing subatmospheric or superatmospheric pressure during...
C204S194000, C204S227000, C205S205000, C205S291000, C205S799000, C438S800000, C438S905000, C438S909000
Reexamination Certificate
active
06841056
ABSTRACT:
A process tool for electrochemically treating a substrate is configured to reduce the oxygen concentration and/or the sulfur dioxide concentration in the vicinity of the substrate so that corrosion of copper may be reduced. In one embodiment, a substantially inert atmosphere is established within the process tool including a plating reactor by providing a continuous inert gas flow and/or by providing a cover that reduces a gas exchange with the ambient atmosphere. The substantially inert gas atmosphere may also be maintained during further process steps involved in electrochemically treating the substrate including required transportation steps between the individual process steps.
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patent: 20010040098 (2001-11-01), Okase et al.
patent: 20020027082 (2002-03-01), Andricacos et al.
patent: 2001319915 (2001-11-01), None
patent: WO 0247139 (2002-06-01), None
Aksu and Doyle, “Electrochemistry of Copper in Aqueous Glycine Solutions,”J. Electrochem. Soc., 148:B51-57, 2001 no month given.
Advanced Micro Devices , Inc.
Koehler Robert R.
Williams Morgan & Amerson P.C.
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